The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2022
Filed:
Feb. 28, 2018
Hitachi High-tech Corporation, Tokyo, JP;
Masami Makuuchi, Tokyo, JP;
Toshifumi Honda, Tokyo, JP;
Nobuhiro Obara, Tokyo, JP;
Shunichi Matsumoto, Tokyo, JP;
Akira Hamamatsu, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
An inspection device capable of inspecting a foreign matter even during rotation acceleration/deceleration of an object under inspection. The inspection device includes a rotation-and-translation unit configured to rotate and translate the object under inspection; a light intensity modulation unit configured to modulate intensity of laser light to irradiate the object under inspection; a light intensity control unit configured to control the light intensity modulation unit; an object-under-inspection-operation detection unit configured to calculate information about a linear speed at a laser irradiation position on the object under inspection; a data processing unit configured to start foreign matter and defect inspection when a rotation speed of the object under inspection reaches a predetermined speed and a rotation-and-translation control unit configured to determine a time required for a next single rotation of a rotation stage, and apply, to a translation stage, a translation control value for moving the translation stage.