The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2022

Filed:

Feb. 03, 2021
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventor:

Russell A. Benson, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10885 (2013.01); H01L 27/10814 (2013.01); H01L 27/10823 (2013.01); H01L 27/10852 (2013.01); H01L 27/10876 (2013.01);
Abstract

A method used in forming integrated circuitry comprises forming horizontally-spaced conductive vias above a substrate. Conducting material is formed directly above and directly against the conductive vias. The conducting material is patterned to form individual conductive lines that are individually directly above a plurality of the conductive vias that are spaced longitudinally-along the respective individual conductive line. The patterning forms the individual conductive lines to have longitudinally-alternating wider and narrower regions. The wider regions are directly above and directly against a top surface of individual of the conductive vias and are wider in a horizontal cross-section that is at the top surface than are the narrower regions in the horizontal cross-section. The narrower regions are longitudinally-between the wider regions. Other embodiments, including structure independent of method, are disclosed.


Find Patent Forward Citations

Loading…