The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Feb. 08, 2021
Azbil Corporation, Tokyo, JP;
AZBIL CORPORATION, Tokyo, JP;
Abstract
To provide a pressure sensor that has high pressure resistance performance, small measurement error by suppressing hysteresis with respect to pressure, and high sensitivity and high productivity, a pressure sensor includes a diaphragm unit with a first main surface that receives a measurement target fluid's pressure and a second main surface located on the opposite side of this first main surface, a housing, and a sensing unit that outputs the diaphragm unit's deformation as an electric signal, in which at least part of the diaphragm unit has a multi-layer structure in which a plurality of thin plate members are stacked, and the plurality of thin plate members are deformed independently of each other while at least part of the plurality of thin plate members is in press-contact to each other in a pressure receiving state in which the measurement target fluid's pressure is applied to the first main surface.