The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Sep. 30, 2020
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Naoto Tsuji, Tokyo, JP;
Ippei Yanagisawa, Sagamihara, JP;
Miho Shimotori, Chofu, JP;
Makoto Igarashi, Tama, JP;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/458 (2006.01); C23C 16/505 (2006.01); C23C 16/455 (2006.01); C23C 16/54 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4582 (2013.01); C23C 16/45536 (2013.01); C23C 16/45544 (2013.01); C23C 16/505 (2013.01); C23C 16/54 (2013.01); H01J 37/3244 (2013.01); H01J 37/32082 (2013.01); H01J 37/32174 (2013.01); H01J 37/32431 (2013.01);
Abstract
Examples of a substrate processing device include an annular distribution ring, a plurality of connection plates continued to the distribution ring and having non-uniform impedances, a shower plate electrically connected to the plurality of connection plates, and a stage provided below the shower plate so as to face the shower plate.