The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2022

Filed:

Jun. 30, 2020
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

Haining Yang, San Diego, CA (US);

ChihWei Kuo, Hsinchu County, TW;

Junjing Bao, San Diego, CA (US);

Assignee:

QUALCOMM Incorporated, San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/092 (2006.01); H01L 29/10 (2006.01); H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 29/786 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0922 (2013.01); H01L 21/02603 (2013.01); H01L 21/823807 (2013.01); H01L 21/823821 (2013.01); H01L 27/0924 (2013.01); H01L 29/0673 (2013.01); H01L 29/1037 (2013.01); H01L 29/42392 (2013.01); H01L 29/66742 (2013.01); H01L 29/66818 (2013.01); H01L 29/785 (2013.01); H01L 29/78696 (2013.01);
Abstract

A transistor channel profile structure may be improved to provide better transistor circuits performance. In one example, a transistor circuit may include different fin profiles for the NMOS transistors and the PMOS transistors, such as the NMOS fins are thicker than the PMOS fins or the NMOS fin has a straight vertical surface and the PMOS fin has a notch at a fin bottom region. In still another example, a transistor circuit may include different nano-sheet profiles for a NMOS GAA device and a PMOS GAA device where the NMOS nano-sheet is thicker than the PMOS nano-sheet. Such configurations optimize the NMOS and the PMOS transistors with the NMOS having a low channel resistance while the PMOS has a lower short channel effect.


Find Patent Forward Citations

Loading…