The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2022
Filed:
Nov. 14, 2018
Canon Kabushiki Kaisha, Tokyo, JP;
Canon Nanotechnologies, Inc., Austin, TX (US);
Kabushiki Kaisha Toshiba, Tokyo, JP;
Keiji Yamashita, Utsunomiya, JP;
Yutaka Watanabe, Shioya-gun, JP;
Takuya Kono, Kanagawa-ken, JP;
Masayuki Hatano, Kanagawa-ken, JP;
Ikuo Yoneda, Mie-ken, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
CANON NANOTECHNOLOGIES, INC., Austin, TX (US);
KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;
Abstract
Provided is an imprint apparatus that applies a resin (drops) dispersed at a plurality of locations on a substrate, brings the resin and a mold into contact, and transfers the contoured pattern that is formed in the mold to the resin comprising: a controller that sets a principal axis direction according to the contoured pattern and an array direction in which a plurality of resin drops are aligned, and determines application positions for the resin such that the array direction is angled with respect to the principal axis direction; and a dispenser that applies the resin based on the application positions that have been determined.