The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 2022

Filed:

Feb. 26, 2020
Applicant:

Benq Materials Corporation, Taoyuan, TW;

Inventors:

Shih-Chieh Teng, Taoyuan, TW;

Ju-Hui Huang, Taoyuan, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/29 (2006.01); C08J 7/048 (2020.01); C08J 7/04 (2020.01); C23C 16/455 (2006.01); C23C 16/40 (2006.01); H01L 33/56 (2010.01);
U.S. Cl.
CPC ...
C08J 7/048 (2020.01); C08J 7/0427 (2020.01); C23C 16/403 (2013.01); C23C 16/45536 (2013.01); C23C 16/45553 (2013.01); H01L 33/56 (2013.01); C08J 2383/07 (2013.01); C08J 2401/02 (2013.01);
Abstract

The disclosure provides a method to optimize atomic layer deposition comprising the following steps: (A) providing a cellulose nanofiber; (B) acidifying the cellulose nanofiber by an acidifying treatment agent; (C) hydrophobing the acidified cellulose nanofiber by a hydrophobinghydrophobic treatment agent; (D) dissolving the acidified and hydrophobed cellulose nanofiber in a solvent to form a cellulose nanofiber solution; (E) coating the cellulose nanofiber solution on a silicone resin film; (F) heating the coated silicone resin film to form a cellulose nanofiber layer on a surface of the silicone resin film; and (G) forming an inorganic coating layer on the surface of the silicone resin film having the cellulose nanofiber layer by atomic layer deposition.


Find Patent Forward Citations

Loading…