The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Aug. 13, 2019
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Da Song, Loudonville, NY (US);
Allan Ward Upham, Waterford, NY (US);
Cornelius Brown Peethala, Slingerlands, NY (US);
Kevin Winstel, East Greenbush, NY (US);
Spyridon Skordas, Troy, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/306 (2006.01); H01L 29/167 (2006.01); H01L 21/67 (2006.01); C09K 13/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/30604 (2013.01); C09K 13/08 (2013.01); H01L 21/6708 (2013.01); H01L 29/167 (2013.01);
Abstract
An apparatus that includes a solution bath of a seasoned solution, the seasoned solution containing a mixture of hydrofluoric acid, nitric acid, and acetic acid; and one or more silicon wafers being suspended in a position above the solution bath, wherein at least a portion of the mixture having been used in thinning the one or more silicon wafers.