The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Oct. 29, 2020
Applicant:
Globalfoundries U.s. Inc., Santa Clara, CA (US);
Inventors:
Yusheng Bian, Ballston Lake, NY (US);
Siva P. Adusumilli, Burlington, VT (US);
Bo Peng, Wappingers Falls, NY (US);
Kenneth J. Giewont, Hopewell Junction, NY (US);
Assignee:
GLOBALFOUNDRIES U.S. INC., Malta, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/124 (2006.01); G02B 6/12 (2006.01); G02B 6/13 (2006.01);
U.S. Cl.
CPC ...
G02B 6/124 (2013.01); G02B 6/13 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12107 (2013.01);
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to grating couplers integrated with one or more airgap and methods of manufacture. The structure includes: a substrate material comprising one or more airgaps; and a grating coupler disposed over the substrate material and the one or more airgaps.