The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Jul. 10, 2019
Applicant:
Sumitomo Electric Industries, Ltd., Osaka, JP;
Inventors:
Hiroshi Fukunaga, Kobe, JP;
Masanori Morishita, Kobe, JP;
Tatsuya Moriwake, Kobe, JP;
Katsushi Hashio, Kobe, JP;
Assignee:
Sumitomo Electric Industries, Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/42 (2006.01);
U.S. Cl.
CPC ...
C30B 29/42 (2013.01);
Abstract
The gallium arsenide single crystal substrate has a circular main surface, and when the diameter of the main surface of the gallium arsenide single crystal substrate is represented by D and the number of etch pits formed on the main surface by immersing the gallium arsenide single crystal substrate in molten potassium hydroxide at 500° C. for 10 minutes is counted, the number Cof etch pits in a first circular region having a diameter of 0.2D around the center of the main surface is 0 or more and 10 or less.