The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2022
Filed:
Apr. 17, 2019
Applicant:
Semigear, Inc., Wakefield, MA (US);
Inventors:
Suncheol Lee, Seoul, KR;
Jaeho Park, Seoul, KR;
Assignee:
SEMIgear, Inc., Wakefield, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/304 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67092 (2013.01); H01L 21/304 (2013.01);
Abstract
Disclosed is an apparatus for applying a force to a partial area of a substrate. The substrate pressing module includes a support member configured to support the substrate, a weight member provided to be positioned on the partial area of the substrate positioned on the support member and having a specific weight or more, and a pressing unit configured to apply a force to the weight member from the upper side.