The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2022
Filed:
Apr. 27, 2020
Applicant:
Applied Materials Israel Ltd., Rehovot, IL;
Inventors:
Ilya Blayvas, Jerusalem, IL;
Gal Bruner, Kibutz Kabri, IL;
Yehuda Zur, Tel-Aviv, IL;
Alexander Mairov, Herzlyiah, IL;
Ron Davidescu, Gedera, IL;
Kfir Dotan, Nes-Ziona, IL;
Alon Litman, Nes-Ziona, IL;
Assignee:
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 1/32 (2006.01); H01J 37/305 (2006.01);
U.S. Cl.
CPC ...
H01J 37/305 (2013.01); G01N 1/32 (2013.01); H01J 2237/24475 (2013.01);
Abstract
A method of evaluating a region of a sample that includes alternating layers of different material. The method includes milling, with a focused ion beam, a portion of the sample that includes the alternating layers of different material; reducing the milling area; and repeating the milling and reducing steps multiple times during the delayering process until the process is complete.