The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2022
Filed:
May. 19, 2020
Tokyo Electron Limited, Tokyo, JP;
Yoshihito Yamasaki, Singapore, SG;
Hiroshi Yamada, Japan, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
There is provided a testing wafer that simulates heat generation of an inspection target substrate. The testing wafer includes a heater pattern, a plurality of temperature sensors, and first and second electrode pads. The heater pattern is configured to heat the testing wafer having the same shape as a shape of the inspection target substrate. The temperature sensors are configured to respectively measure temperatures of multiple locations on the testing wafer. The first electrode pads are connected to the heater pattern and the second electrode pads are connected to the temperature sensors. The first and second electrode pads are installed to be in contact with probes of a probe card.