The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2022
Filed:
May. 15, 2020
Disco Corporation, Tokyo, JP;
Satoshi Yamanaka, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A tilt adjusting mechanism provided in a processing apparatus including a chuck table having a holding surface for holding a workpiece thereon and a processing unit having a processing surface for processing the workpiece held on the chuck table, for adjusting parallelism between the holding surface and the processing surface. The tilt adjusting mechanism includes at least three support posts supporting the chuck table, the support posts including at least one expansible and contractible support post that is provided with a piezoelectric actuator including layered piezoelectric elements, a direct current power supply electrically connected to the piezoelectric actuator, and a voltage controller for controlling a direct current voltage value of direct current electric power supplied to the piezoelectric actuator.