The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 26, 2022

Filed:

Jan. 06, 2017
Applicant:

Bruker Nano, Inc., DelRay Beach, FL (US);

Inventors:

Jeffrey E. LeClaire, Boca Raton, FL (US);

Kenneth G. Roessler, Boca Raton, FL (US);

David Brinkley, Baltimore, MD (US);

Alexander M. Figliolini, Lake Worth, FL (US);

Assignee:

Bruker Nano, Inc., Delray Beach, FL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); G03F 1/84 (2012.01); G03F 1/82 (2012.01);
U.S. Cl.
CPC ...
B08B 7/0042 (2013.01); G03F 1/82 (2013.01); G03F 1/84 (2013.01); Y10S 134/902 (2013.01);
Abstract

Method and apparatus for identifying a contaminant on a substrate. Identification of a contaminant removed from a substrate can be useful in identifying and eliminating or reducing the source of the contamination and tailoring the removal method to minimize the potential for substrate damage. The methods and apparatus for identification of the contaminant provide liberation of molecules of the contaminant from the surface of the substrate, accounting for different geometries and substrate materials, sample preparation, and chemical analysis of the contaminant.


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