The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 19, 2022

Filed:

Sep. 25, 2018
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Wolfgang Bathe, Jena, DE;

Stanislav Kalinin, Weimar, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
G02B 21/008 (2013.01); G02B 21/0032 (2013.01); G02B 21/0036 (2013.01); G02B 21/0072 (2013.01);
Abstract

A method for the high-resolution scanning microscopy of a specimen where the specimen is illuminated with illuminating radiation such that the illuminating radiation is focused to a diffraction-limited illuminating spot at a point in or on the specimen. The point is projected in a diffraction-limited manner in a diffraction image onto a flat panel detector having pixels. The flat panel detector, owing to the pixels thereof, have a spatial resolution which resolves a diffraction structure of the diffraction image. The point is shifted relative to the specimen into different scanning positions by an increment which is smaller than the diameter of the illuminating spot and a 3D image is generated. The pixels of the flat panel detector are divided into groups. A pre-calculated raw image is calculated for each group and are unfolded three-dimensionally to generate the image of the specimen.


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