The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2022
Filed:
Mar. 18, 2020
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Alberto Cagliani, Kongens Lyngby, DK;
Frederik Westergaard Østerberg, Kongens Lyngby, DK;
Chia-Hung Wei, Kongens Lyngby, DK;
Assignee:
KLA CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); H01L 27/22 (2006.01); H01L 43/02 (2006.01); G01R 1/04 (2006.01); G01R 31/26 (2020.01); G11C 29/50 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2884 (2013.01); G01R 1/0491 (2013.01); G01R 31/2648 (2013.01); G11C 29/50 (2013.01); H01L 27/222 (2013.01); H01L 43/02 (2013.01); G01R 31/2894 (2013.01);
Abstract
The method may be used for measuring an electric property of a magnetic tunnel junction used in an embedded MRAM memory for example. The method uses a multi point probe with a plurality of probe tips for contacting a designated area of the test sample, which is electrically insulated from the part of the test sample which is to be tested. Electrically connections are placed underneath the magnetic tunnel junction and goes to the designated area.