The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2022
Filed:
Jan. 05, 2017
Asml Netherlands B.v., Veldhoven, NL;
Maarten Hartger Kimman, Veldhoven, NL;
Dave Braaksma, Veldhoven, NL;
Peter Michel Silvester Maria Heijmans, Weert, NL;
Christiaan Alexander Hoogendam, Westerhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pmin a first direction and a pitch Pmin a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pcin the first coil set in the first direction over Pmis different from a ratio R2 of a coil pitch Pcin the second coil set in the second direction over Pm