The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2022
Filed:
Aug. 10, 2018
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Christopher Sears, Fremont, CA (US);
Luca Grella, Gilroy, CA (US);
Assignee:
KLA-TENCOR CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/063 (2006.01); H01J 37/073 (2006.01); H01J 37/24 (2006.01); H01J 37/28 (2006.01); H01J 37/065 (2006.01);
U.S. Cl.
CPC ...
H01J 37/065 (2013.01); H01J 37/073 (2013.01); H01J 37/241 (2013.01); H01J 37/28 (2013.01); H01J 2237/06375 (2013.01);
Abstract
Electron gun systems with a particular inner width dimension, sweep electrodes, or a combination of a particular inner width dimension and sweep electrodes are disclosed. The inner width dimension may be less than twice a value of a Larmor radius of secondary electrons in a channel downstream of a beam limiting aperture, and a Larmor time for the secondary electrons may be greater than 1 ns. The sweep electrode can generates an electric field in a drift region, which can increase kinetic energy of secondary electrons in the channel.