The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2022
Filed:
Jun. 13, 2019
Asml Netherlands B.v., Veldhoven, NL;
Simon Reinald Huisman, Eindhoven, NL;
Alessandro Polo, Arendonk, BE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A sensor apparatus () for determining a position of a target () of a substrate (W) comprising, projection optics () configured to project a radiation beam () onto the substrate, collection optics () configured to collect measurement radiation () that has scattered from the target, a wavefront sensing system () configured to determine a pupil function variation of at least a portion () of the measurement radiation and output a signal () indicative thereof, and a measurement system () configured to receive the signal and to determine the position of the target in at least partial dependence on the collected measurement radiation and the determined pupil function variation of at least a portion of the measurement radiation.