The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 12, 2022

Filed:

Mar. 19, 2020
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Stanislav Kalinin, Weimar, DE;

Volodymyr Kudryavtsev, Jena, DE;

Thomas Egloff, Jena, DE;

Alexander Kolarow, Jena, DE;

Joerg Engel, Weida, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/06 (2006.01); G02B 21/00 (2006.01); G02B 21/36 (2006.01);
U.S. Cl.
CPC ...
G02B 21/0072 (2013.01); G02B 21/008 (2013.01); G02B 21/0032 (2013.01); G02B 21/367 (2013.01);
Abstract

A method for high-resolution scanning microscopy of a sample, wherein the sample is illuminated with illumination light such that the illumination light is focused at a point in or on the sample into an illumination spot. The point is imaged into a diffraction image onto an area detector having detector elements. The area detector has a spatial resolution that resolves a diffraction structure of the diffraction image. The sample is here scanned line-wise in a grid made of rows and columns by displacing the point relative to the sample into different scanning positions with an increment width that is smaller than the diameter of the illumination spot. The area detector is read, and an image of the sample is generated from the data of the area detector and from the scanning positions assigned to said data, said image having a resolution that is increased beyond a resolution limit for imaging.


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