The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2022
Filed:
Jul. 22, 2020
Applicant:
Bruker Nano Gmbh, Berlin, DE;
Inventor:
Daniel Radu Goran, Berlin, DE;
Assignee:
BRUKER NANO GMBH, Berlin, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/207 (2018.01); G01T 1/20 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
G01N 23/207 (2013.01); G01T 1/2006 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); G01N 2223/0565 (2013.01); G01N 2223/505 (2013.01);
Abstract
A detector for Kikuchi diffraction comprising a detector body and a detector head mountable to each other. The detector body comprises a body part which is enclosing a photodetector configured for detecting incident radiation and further comprises a vacuum window arranged upstream the photodetector with respect to a propagation direction of the incident radiation, a first body mounting portion configured to be mounted to a SEM chamber port and a second body mounting portion. The detector head comprises a scintillation screen and a head mounting portion configured to be mounted to the second body mounting portion.