The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 05, 2022

Filed:

Aug. 31, 2021
Applicant:

Yield Engineering Systems, Inc., Fremont, CA (US);

Inventors:

Christopher Lane, Los Gatos, CA (US);

Eli Vronsky, Los Altos, CA (US);

Taylor Nguyen, Milpitas, CA (US);

Ronald R Stevens, Pleasanton, CA (US);

Gabriel Ormonde, Lathrop, CA (US);

Jed Hsu, Fremont, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); B23K 1/008 (2006.01); B23K 37/04 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 24/75 (2013.01); B23K 1/008 (2013.01); B23K 37/0452 (2013.01); H01L 24/11 (2013.01); B23K 2101/40 (2018.08); H01L 24/74 (2013.01); H01L 2224/11849 (2013.01); H01L 2224/759 (2013.01); H01L 2224/7565 (2013.01); H01L 2224/75252 (2013.01); H01L 2224/75272 (2013.01); H01L 2224/75283 (2013.01); H01L 2224/75501 (2013.01); H01L 2224/75802 (2013.01);
Abstract

A solder reflow oven includes a processing chamber that defines an enclosure. The enclosure includes a spindle configured to support a substrate and rotate the substrate about a central axis of the processing chamber. The spindle is also configured to move vertically along the central axis and position the substrate at different locations within the enclosure. The oven further includes a chemical delivery tube configured to direct a chemical vapor into the enclosure, a lamp assembly configured to heat a top surface of the substrate, and a lift assembly configured to move the spindle along the central axis.


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