The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2022
Filed:
Feb. 06, 2019
Asml Netherlands B.v., Veldhoven, NL;
Richard Johannes Franciscus Van Haren, Waalre, NL;
Leon Paul Van Dijk, Eindhoven, NL;
Orion Jonathan Pierre Mouraille, Eindhoven, NL;
Anne Marie Pastol, Montbonnot Saint Martin, FR;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Methods and apparatuses for determining a position of an alignment mark applied to a region of a first layer on a substrate using a lithographic process by: obtaining an expected position of the alignment mark; obtaining a geometrical deformation of the region due to a control action correcting the lithographic process; obtaining a translation of the alignment mark due to the geometrical deformation; and determining the position of the alignment mark based on the expected position and the translation.