The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2022
Filed:
Jul. 25, 2018
Tokyo Electron Limited, Tokyo, JP;
Shigeki Ishii, Yamanashi, JP;
Katsuaki Sugiyama, Yamanashi, JP;
Kenichi Narikawa, Yamanashi, JP;
Koji Shinagawa, Yamanashi, JP;
Takumi Nagura, Yamanashi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A voltage application device of a tester includes a voltage setting controller that sets a number of transient steps, step time, and step voltage as transient voltage setting parameters; and a device power supply (DPS) configured to supply power to the plurality of devices under test formed on a substrate. The voltage application device outputs an output voltage having a step-like transient voltage waveform based on the transient voltage setting parameters set by the voltage setting controller. The voltage application device is a high-order lag system of a second-order or higher in which an overshoot occurs in a response with respect to a set voltage. An end point of a step time of each of the transient steps set in the voltage setting controller is set to be a time between an end point of a rising time and an overshoot time.