The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2022
Filed:
Sep. 28, 2020
Applicant:
Otsuka Electronics Co., Ltd., Osaka, JP;
Inventors:
Shiro Kawaguchi, Hirakata, JP;
Kazuya Nakajima, Hirakata, JP;
Assignee:
Otsuka Electronics Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/06 (2006.01); G01N 21/25 (2006.01);
U.S. Cl.
CPC ...
G01B 11/0625 (2013.01); G01N 21/255 (2013.01);
Abstract
A film thickness measuring apparatus including: a measurement light path for irradiating a measurement target object with light from a light source; a correction light path for irradiating a reference member with light from the light source; and a light switching unit that selectively guides reflected light from the measurement target object or reflected light from the reference member, to a spectroscope.
Kawaguchi, Shiro. (2022). Film thickness measuring apparatus and film thickness measuring method (U.S. Patent No. 11293750). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11293750
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