The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 29, 2022

Filed:

Jun. 03, 2020
Applicant:

Mpi Corporation, Hsinchu County, TW;

Inventors:

Stojan Kanev, Hsinchu County, TW;

Yu-Hsun Hsu, Hsinchu County, TW;

Chien-Hung Chen, Hsinchu County, TW;

Assignee:

MPI CORPORATION, Hsinchu County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/319 (2006.01); G01K 7/01 (2006.01); G01C 3/02 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 31/31905 (2013.01); G01C 3/02 (2013.01); G01K 7/01 (2013.01); G01R 31/2874 (2013.01); G01R 31/2886 (2013.01);
Abstract

A method for compensating to a first distance between a probe tip and a device under test (DUT) after a temperature change of the DUT includes: capturing a first image having the probe and its reflected image on a reflective surface of the DUT at a first temperature; measuring a second distance between a reference point of the probe and its reflected image; changing the first temperature of the DUT to a second temperature; capturing a second image having the probe and its reflected image on the reflective surface at the second temperature; measuring a third distance between the reference point of the probe and its reflected image; dividing the difference between the third and the second distances by two to obtain a fourth distance; and determining a relative position between the probe and the DUT by the fourth distance to compensate to the first distance.


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