The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2022
Filed:
Feb. 09, 2015
Applicant:
Trek, Inc., Lockport, NY (US);
Inventors:
Assignee:
Trek, Inc., Lockport, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01G 7/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01G 7/02 (2013.01);
Abstract
A clamping system and a method of clamping a work piece are disclosed. The clamping system has an electrostatic clamp and a high-impedance voltmeter ('HIV'). The electro-static clamp may include a platen and a plurality of electrodes embedded in the platen. In use, at least some of the embedded electrodes provide one side of a capacitor and a work piece provides another side of the capacitor in order to hold the work piece relative to the platen when at least some of the embedded electrodes are electrically charged. The HIV is electrically connected to at least some of the embedded electrodes.