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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11281100 B1

PDFFull Text
Date of Patent:
Mar. 22, 2022

Filed:

May. 29, 2019

Radiation-sensitive resin composition, onium salt compound and method for forming resist pattern

Applicant:

Jsr Corporation, Tokyo, JP;

Inventor:

Katsuaki Nishikori, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Amanda C Walke

Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 309/17 (2006.01); C07C 381/12 (2006.01); C07D 307/12 (2006.01); C07D 307/33 (2006.01); C07D 317/38 (2006.01); C07D 333/46 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); C09K 3/00 (2006.01); G03F 7/20 (2006.01); G03F 7/16 (2006.01); G03F 7/32 (2006.01); G03F 7/38 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 309/17 (2013.01); C07C 381/12 (2013.01); C07D 307/12 (2013.01); C07D 307/33 (2013.01); C07D 317/38 (2013.01); C07D 333/46 (2013.01); C09K 3/00 (2013.01); G03F 7/004 (2013.01); G03F 7/038 (2013.01); G03F 7/039 (2013.01); G03F 7/20 (2013.01); C07C 2601/14 (2017.05); C07C 2602/42 (2017.05); C07C 2603/18 (2017.05); C07C 2603/74 (2017.05); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2006 (2013.01); G03F 7/2041 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01);
Abstract

A radiation-sensitive resin composition includes a resin including a structural unit having an acid-dissociable group, an onium salt compound represented by formula (1), and a solvent. Ris a hydrogen atom or a monovalent group provided that the monovalent group is not a fluoro group or a monovalent organic group containing a fluorine atom. Xand Xare each independently a single bond, —O—, —S— or —NR'— wherein R′ is a hydrogen atom or a monovalent hydrocarbon group. In a case where Xis —NR′—, Ris a monovalent organic group or a hydrogen atom. In a case where Xis —NR′—, Ris a monovalent organic group or a hydrogen atom. In a case where neither Xnor Xis —NR′—, Rand Rare each independently a monovalent organic group.

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