The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2022
Filed:
Nov. 21, 2018
Applicant:
Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/06 (2006.01); C30B 29/38 (2006.01); C30B 29/42 (2006.01); C30B 29/44 (2006.01); C30B 29/20 (2006.01); C23C 14/06 (2006.01); C30B 29/22 (2006.01); C30B 25/18 (2006.01); C23C 14/34 (2006.01); C30B 29/36 (2006.01);
U.S. Cl.
CPC ...
C30B 29/38 (2013.01); C23C 14/0641 (2013.01); C23C 14/34 (2013.01); C30B 25/06 (2013.01); C30B 25/18 (2013.01); C30B 29/20 (2013.01); C30B 29/22 (2013.01); C30B 29/36 (2013.01); C30B 29/42 (2013.01); C30B 29/44 (2013.01);
Abstract
A composite nitride-based film structure includes a bulk single crystal, a plurality of nitride microcrystals, and an amorphous nitride thin film. The plurality of nitride microcrystals is provided on the bulk single crystal, and has a specific orientation relationship with a crystal structure of the bulk single crystal. The nitride thin film is provided on the bulk single crystal, surrounds the nitride microcrystal, and covers a surface of the bulk single crystal.