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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11275307 B1

PDFFull Text
Date of Patent:
Mar. 15, 2022

Filed:

Jun. 17, 2019

Resist composition, method of forming resist pattern, polymeric compound, and compound

Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Inventors:

Masatoshi Arai, Kawasaki, JP;

Takaya Maehashi, Kawasaki, JP;

Koshi Onishi, Kawasaki, JP;

Assignee:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Attorney:

Knobbe Martens Olson & Bear LLP

Primary Examiner:

Amanda C Walke

Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/038 (2006.01); C07C 69/76 (2006.01); C08F 220/14 (2006.01); C08F 212/14 (2006.01); C08F 220/18 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/38 (2006.01); G03F 7/32 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0397 (2013.01); C07C 69/76 (2013.01); C08F 212/22 (2020.02); C08F 220/14 (2013.01); C08F 220/1812 (2020.02); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01); C07C 2601/08 (2017.05); C07C 2601/14 (2017.05); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2004 (2013.01); G03F 7/2037 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01);
Abstract

A resist composition including a resin component which exhibits changed solubility in a developing solution under action of acid, the resin component including a structural unit represented by general formula (a0) shown below in which Varepresents a single bond or a divalent linking group; Wa represents a divalent aromatic hydrocarbon group which may have a substituent; Yarepresents a carbon atom; Xarepresents a group which forms a cyclic hydrocarbon group together with Ya; Rarepresents a hydrocarbon group which may have a substituent; provided that at least one of Xaand Rahas a carbon atom constituting a carbon-carbon unsaturated bond at an α-position of Ya.

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