The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2022
Filed:
Nov. 24, 2020
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Assignee:
CARL ZEISS SMT GMBH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G03F 7/20 (2006.01); G01B 9/02003 (2022.01); G01B 9/02001 (2022.01); G01B 9/02018 (2022.01); G01B 9/02017 (2022.01);
U.S. Cl.
CPC ...
G01B 9/02003 (2013.01); G01B 9/02008 (2013.01); G01B 9/02018 (2013.01); G01B 9/02019 (2013.01); G03F 7/7085 (2013.01); G03F 7/70775 (2013.01);
Abstract
A measuring assembly for the frequency-based determination of the position of a component, in particular in an optical system for microlithography, includes at least one optical resonator, which has a stationary first resonator mirror, a movable measurement target assigned to the component, and a stationary second resonator mirror. The second resonator mirror is formed by an inverting mirror (), which reflects back on itself a measurement beam coming from the measurement target.