The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2022
Filed:
Jul. 25, 2019
Applicant:
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Inventors:
Y. L. Huang, Hsinchu, TW;
Chin-Kun Fang, Tainan, TW;
Li-Jen Wu, Tainan, TW;
Yu Kai Chen, Hsinchu, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D 35/02 (2006.01); B01D 19/00 (2006.01); H01L 21/67 (2006.01); B01D 19/02 (2006.01);
U.S. Cl.
CPC ...
B01D 35/02 (2013.01); B01D 19/0031 (2013.01); B01D 19/02 (2013.01); H01L 21/6715 (2013.01); H01L 21/67017 (2013.01); B01D 19/0042 (2013.01); B01D 19/0063 (2013.01);
Abstract
A system for dispensing a liquid includes a filter adapted to filter a liquid and to provide a filtered liquid at a liquid outlet of the filter, and a tank having a liquid inlet coupled to the liquid outlet of the filter via a first pipe. The tank includes an upper portion having a first lateral dimension and a lower portion having a second lateral dimension less than the first lateral dimension. The upper portion of the tank is above the liquid inlet of the tank.