The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2022
Filed:
Nov. 01, 2018
Korea Institute of Fusion Energy, Daejeon, KR;
Yong Sup Choi, Gunsan, KR;
Kang Il Lee, Gunsan, KR;
Dong Chan Seok, Gunsan, KR;
Soo Ouk Jang, Sejong, KR;
Jong Sik Kim, Gunsan, KR;
Seung Ryul Yoo, Daejeon, KR;
KOREA INSTITUTE OF FUSION ENERGY, Daejeon, KR;
Abstract
An atomic layer polishing method is described. The method includes: scanning the surface of a specimen to measure a peak site on the specimen surface; spraying toward the measured peak site a gas containing an element capable of binding to a first atom, which is an ingredient of the material of the specimen to form a first reaction gas layer in which the first reaction gas binds to the first atom on the surface of the peak; and projecting ions of inert gas to the peak site on which the first reaction gas layer is deposited to separate the first atom bound to the first reaction gas from the specimen.