The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Sep. 03, 2020
Gigaphoton Inc., Tochigi, JP;
Masaki Nakano, Oyama, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
A target supply device according to an aspect of the present disclosure includes a nozzle through which a liquid target substance is output, and a vibration unit configured to vibrate the target substance supplied to the nozzle, and the vibration unit includes a vibration element configured to vibrate in accordance with applied drive voltage from outside, a vibration transfer unit contacting the nozzle and configured to transfer vibration of the vibration element to the nozzle, a load application member configured to apply a pressing load for pressing the vibration transfer unit against the nozzle, and a load adjustment device configured to adjust the pressing load in accordance with a signal from outside.