The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2022

Filed:

Jan. 15, 2019
Applicant:

Csmc Technologies Fab2 Co., Ltd., Wuxi New District, CN;

Inventor:

Guangyang Wang, Wuxi New District, CN;

Assignee:

CSMC TECHNOLOGIES FAB2 CO., LTD., Wuxi New District, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/40 (2006.01); H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
H01L 29/402 (2013.01); H01L 29/0653 (2013.01); H01L 29/7816 (2013.01); H01L 29/7835 (2013.01); H01L 23/5226 (2013.01);
Abstract

A semiconductor device includes a semiconductor substrate, a field oxide layer, a gate region and field plate integrated structure and a plurality of contact holes. A body region and a drift region are formed in the semiconductor substrate. An active region is formed in the body region, and a drain region is formed in the drift region. A field oxide layer is located on the drift region and the drift region surrounds a part of the field oxide layer. An integrated structure including a gate region and a field plate, the integrated structure extending from above the field oxide layer to above the body region. A depth of a contact hole closer to the source region penetrating into the field oxide layer is greater than a depth of a contact hole closer to the drain region penetrating into the field oxide layer.


Find Patent Forward Citations

Loading…