Semiconductor memory device with air gaps between conductive features and method for preparing the same

Abstract

The present disclosure provides a semiconductor memory device with air gaps between conductive features for reducing capacitive coupling and a method for preparing the semiconductor memory device. The semiconductor memory device includes an isolation layer defining a first active region in a substrate; a first doped region positioned in the first active region; a first word line buried in a first trench adjacent to the first doped region; a high-level bit line contact positioned on the first doped region; a first air gap surrounding the high-level bit line contact; wherein the first word line comprises a lower electrode structure and an upper electrode structure on the lower electrode structure; wherein the upper electrode structure comprises: a source layer substantially covering a sidewall of the first trench; a conductive layer on the source layer; and a work-function adjustment layer disposed between the source layer and the conductive layer.