The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2022

Filed:

Jul. 17, 2020
Applicant:

Nanya Technology Corporation, New Taipei, TW;

Inventors:

Shyue-Ru Doong, New Taipei, TW;

Feng-Ju Tsai, Zhubei, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06T 7/13 (2017.01); G06T 7/00 (2017.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G06T 7/13 (2017.01); G06T 7/0006 (2013.01); H01L 21/67259 (2013.01); G06T 2207/30148 (2013.01);
Abstract

The present disclosure provides an alert device and an alert method. The alert device includes an image capturing unit, an input/output unit and a processing unit. The image capturing unit is configured to capture at least one image of a wafer transportation system. The processing unit is configured to: retrieve the at least one image from the image capturing unit; define a first boundary in the at least one image; identify a wafer chuck of the wafer transportation system in the at least one image; determine whether the wafer chuck intersects the first boundary in the at least one image; and transmit an alert signal to the wafer transportation system via the input/output unit when the wafer chuck is determined to intersect the first boundary in the at least one image.


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