The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2022

Filed:

Mar. 24, 2020
Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Patrick Sebastian Uebel, Marloffstein, DE;

Sebastian Thomas Bauerschmidt, Wendelstein, DE;

Paul William Scholtes-Van Eijk, Veldhoven, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 9/00 (2006.01); G03F 7/20 (2006.01); G02B 6/02 (2006.01); G02F 1/365 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7065 (2013.01); G02B 6/02328 (2013.01); G02F 1/365 (2013.01); G03F 7/7015 (2013.01); G03F 7/70133 (2013.01); G03F 7/70316 (2013.01); G03F 7/70325 (2013.01); G03F 7/70575 (2013.01); G03F 7/70616 (2013.01);
Abstract

An apparatus () for receiving input radiation () and broadening a frequency range of the input radiation so as to provide broadband output radiation (). The apparatus comprises a fiber (), wherein the fiber () may comprise a hollow core () for guiding radiation propagating through the fiber (). The apparatus () further comprises an apparatus for providing a gas mixture () within the hollow core (). The gas mixture () comprises a hydrogen component, and a working component, wherein the working component is for broadening a frequency range of a received input radiation () so as to provide the broadband output radiation (). The apparatus may be included in a radiation source.


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