The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Jul. 11, 2019
Applicant:
Onto Innovation Inc., Wilmington, MA (US);
Inventors:
James Millerd, Tucson, AZ (US);
Eric Frey, Tucson, AZ (US);
Assignee:
Onto Innovation Inc., Wilmington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
G01B 11/2441 (2013.01);
Abstract
An optical device for characterizing a workpiece combines an interferometer with a polarization rotation pellicle, installed in a stand-alone fashion in a spatial gap between the mirrors of the interferometer, and a polarization based phase-shift sensor.
Quick Actions:
Millerd, James. (2022). On-axis dynamic interferometer and optical imaging systems employing the same (U.S. Patent No. 11262191). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11262191
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