The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Feb. 13, 2017
Disco Corporation, Tokyo, JP;
Kunio Oshida, Tokyo, JP;
Hiroyuki Hashimoto, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A processing apparatus includes a processing unit. The processing unit includes a spindle, a spindle housing having an air bearing for rotatably supporting the spindle by using air, and a tool mounted on the front end of the spindle. The spindle housing has an air supply passage for supplying air to the air bearing, an air supply port connected to the air supply passage, an air discharge passage, and an air discharge port. The air supply port is connected through an air supply line to an air source. The air supply line is provided with a pressure gauge and a flowmeter. A first allowable value is previously set for the pressure to be detected by the pressure gauge, and a second allowable value is previously set for the flow rate to be detected by the flowmeter.