The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 22, 2022

Filed:

Mar. 24, 2020
Applicant:

Nuvoton Technology Corporation Japan, Kyoto, JP;

Inventors:

Kenichi Miyajima, Toyama, JP;

Yoshiaki Katou, Toyama, JP;

Akihiko Nishio, Ishikawa, JP;

Kaname Motoyoshi, Hyogo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 23/00 (2006.01); H01L 27/00 (2006.01); H01L 29/778 (2006.01); H01L 29/06 (2006.01); H01L 29/20 (2006.01); H01L 29/205 (2006.01); H01L 29/40 (2006.01); H01L 29/423 (2006.01); H01L 29/47 (2006.01); H01L 29/8605 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7786 (2013.01); H01L 29/0619 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/402 (2013.01); H01L 29/423 (2013.01); H01L 29/475 (2013.01); H01L 29/8605 (2013.01);
Abstract

A resistive element that includes: a substrate; a first nitride semiconductor layer; a second nitride semiconductor layer; a two-dimensional electron gas layer on the first nitride semiconductor layer side at an interface between the first nitride semiconductor layer and the second nitride semiconductor layer; a first electrode ohmically connected to the two-dimensional electron gas layer; a second electrode ohmically connected to the two-dimensional electron gas layer; and an insulating layer between the first electrode and the second electrode in plan view. The two-dimensional electron gas layer functions as an electric resistance element. A conductive layer is not provided above the insulating layer between the first electrode and the second electrode in the plan view. The resistive element has a resistance-value stabilization structure that functions to keep a resistance value of the electric resistance element constant.


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