The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2022
Filed:
Apr. 29, 2019
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Tatsuya Yamaguchi, Iwate, JP;
Yasuaki Kikuchi, Iwate, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01K 7/42 (2006.01); G01K 1/14 (2021.01); G01K 1/02 (2021.01); G01D 1/18 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67248 (2013.01); G01D 1/18 (2013.01); G01K 1/026 (2013.01); G01K 1/14 (2013.01); G01K 7/42 (2013.01); H01L 21/67098 (2013.01); H01L 21/67109 (2013.01);
Abstract
A temperature monitoring apparatus includes: a calculator configured to calculate a temperature monitoring waveform by a first-order lag function based on an elapsed time from a start of a temperature change from a first temperature to a second temperature, and a time constant calculated based on a locus of the temperature change; and a monitor configured to monitor a temperature changing from the first temperature to the second temperature based on the temperature monitoring waveform calculated by the calculator.