The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2022
Filed:
Mar. 05, 2021
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Kenneth Lik Kin Ho, Redwood City, CA (US);
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
A method includes determining a first transmission cross coefficient (TCC) operator of an optical system of a lithographic system based on an illumination source. The method includes sampling the illumination source by a first number of sampling points to produce a first discrete source and determining a second TCC operator based on the first discrete source. The method also includes determining an error between the first TCC operator and the second TCC operator. The method includes recursively adjusting the first number of sampling points to re-sample the illumination source and to re-determine the second TCC operator until the error is below a threshold level and a final discrete source and a final second TCC operator is determined.