The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 22, 2022

Filed:

Sep. 21, 2018
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventor:

Akira Ide, Sagamihara, JP;

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); H01L 25/065 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2853 (2013.01); H01L 25/0657 (2013.01); H01L 2225/06541 (2013.01); H01L 2225/06596 (2013.01);
Abstract

Embodiments of the disclosure are drawn to apparatuses and methods for testing through silicon vias (TSVs) which may be used, for example, to couple layers of a semiconductor memory device. The TSVs and/or the die around the TSVs may require testing. A switch circuit may be used to selectively couple one or more test circuits to an amplifier. The test circuits may generate a voltage that is related to one or more parameters of the TSV being tested. The amplifier may amplify the voltage, which may be used to determine if the TSV passes the particular test determined by the test circuit selected by the switch circuit. The switch circuit and/or other components of the test circuits may be controlled by control signals to determine the operation of a particular test.


Find Patent Forward Citations

Loading…