The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Mar. 16, 2020
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
James J. Kelly, Schenectady, NY (US);
Cornelius Brown Peethala, Slingerlands, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/532 (2006.01); H01L 21/768 (2006.01); H01L 21/288 (2006.01);
U.S. Cl.
CPC ...
H01L 23/53209 (2013.01); H01L 21/76802 (2013.01); H01L 21/76847 (2013.01); H01L 21/76849 (2013.01); H01L 21/76877 (2013.01);
Abstract
Various methods and structures for fabricating BEOL metallization layer including at least one bulk cobalt contact, the at least one bulk cobalt contact including a replacement non-cobalt metal cap integral to the at least one bulk cobalt contact. The method includes performing selective deposition, by a chemical exchange reaction of metal between a non-cobalt metal and Cobalt in the at least one bulk cobalt contact, of the replacement non-cobalt metal cap integrally formed in a top surface region of the bulk cobalt contact.