The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 15, 2022

Filed:

Mar. 29, 2016
Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Takashi Ohshima, Tokyo, JP;

Hiroyuki Minemura, Tokyo, JP;

Yumiko Anzai, Tokyo, JP;

Momoyo Enyama, Tokyo, JP;

Yoichi Ose, Tokyo, JP;

Toshihide Agemura, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/073 (2006.01); H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/073 (2013.01); H01J 37/22 (2013.01); H01J 2237/06333 (2013.01); H01J 2237/2482 (2013.01); H01J 2237/2614 (2013.01);
Abstract

To provide an electron microscope capable of performing the switching-over between normal illumination and annular illumination, wide-area irradiation, an interference pattern as desired or normal illumination in an expeditious and readily manner or achieving a better S/N ratio, the electron microscope comprises a photocathodewith negative electron affinity in use; an excitation optical system to excite the photocathode; and an electron optics system to irradiate an electron beamgenerated from the photocathode by excitation lightirradiated through the excitation optical system onto a sample, the excitation optical system including a light source devicefor the excitation light; and an optical modulation meanswhich is disposed in an optical path of the excitation light to perform spatial phase modulation to the excitation light.


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