The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Apr. 30, 2018
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Byung-Jin Choi, Austin, TX (US);
Se-Hyuk Im, Austin, TX (US);
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 9/00 (2006.01); G03F 7/00 (2006.01); B82Y 40/00 (2011.01); B29C 45/77 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7042 (2013.01); B29C 45/77 (2013.01); G03F 7/0002 (2013.01); B29C 2791/006 (2013.01); B82Y 40/00 (2013.01);
Abstract
A system and method of imprinting a formable material on a substrate includes a feature with a template. The substrate is initially held with a first back pressure. After which the template is brought into contact with the formable material. A template strain tensor above the feature may be greater than a strain threshold. The substrate is then held with a second back pressure less than the first back pressure, after which the substrate strain below the feature increases. After which the formable material is solidified.