The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Apr. 14, 2020
Tokyo Electron Limited, Tokyo, JP;
Kazushi Kaneko, Miyagi, JP;
Yohei Ishida, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method includes measuring first travelling wave power of a microwave having a single frequency peak and second travelling wave power having a single frequency peak, acquiring duty ratios of the first travelling wave power and the second travelling wave power based on measured values and a first determination threshold value, measuring third travelling wave power of a microwave having a bandwidth and fourth travelling wave power having a bandwidth, acquiring duty ratios of the third travelling wave power and the fourth travelling wave power based on measured values and a second determination threshold value, approximating a pulse width error between the first travelling wave power and the third travelling wave power and a pulse width error between the second travelling wave power and the fourth travelling wave power with linear functions, and determining the correction function based on the linear functions.