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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11244845 B1

PDFFull Text
Date of Patent:
Feb. 08, 2022

Filed:

Sep. 26, 2018

Vacuum chamber arrangement and method for processing a substrate

Applicant:

Von Ardenne Asset Gmbh & Co. KG, Dresden, DE;

Inventors:

Joerg Pollack, Wilsdruff, DE;

Lutz Gottsmann, Grossroehrsdorf, DE;

Georg Laimer, Meissen, DE;

Assignee:

VON ARDENNE ASSET GMBH & CO. KG, Dresden, DE;

Attorney:

Viering, Jentschura & PartnermbB

Primary Examiner:

Michael S Lowe

Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); C23C 16/458 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); C23C 14/505 (2013.01); C23C 14/54 (2013.01); C23C 16/4582 (2013.01); H01L 21/6715 (2013.01); H01L 21/6719 (2013.01); H01L 21/67109 (2013.01); H01L 21/67161 (2013.01); H01L 21/67196 (2013.01); H01L 21/67207 (2013.01); H01L 21/67703 (2013.01); H01L 21/67748 (2013.01); H01L 21/68764 (2013.01);
Abstract

A vacuum chamber having a vacuum chamber; at least one processing region arranged in the vacuum chamber; and a substrate holding arrangement for transporting and/or positioning a substrate or multiple substrates in the processing region, wherein the substrate holding arrangement has: a first drive train with a first substrate holder, the first substrate holder being configured to rotatably hold one or more substrates, a second drive train with a first support arm, wherein the first substrate holder is held rotatably by the first support arm, a third drive train with a second substrate holder, the second substrate holder being configured for rotatably holding one or more substrates, and a fourth drive train with a second support arm, wherein the second substrate holder is held rotatably by the second support arm, and wherein the first, second, third and fourth drive trains are each configured to be controllable independently of one another.

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